Long- range ordered vertical III- nitride nanocylinder arrays via plasma- assisted atomic layer deposition

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dc.authoridBIYIKLI, Necmi/0000-0001-9387-5145|Haider, Ali/0000-0001-5978-3677|Yilmaz, Ibrahim/0000-0003-1503-4046|Elmabruk, Kholoud/0000-0002-8873-584X;
dc.contributor.authorHaider, Ali
dc.contributor.authorDeminskyi, Petro
dc.contributor.authorYilmaz, Mehmet
dc.contributor.authorElmabruk, Kholoud
dc.contributor.authorYilmaz, Ibrahim
dc.contributor.authorBiyikli, Necmi
dc.date.accessioned2025-10-24T18:09:12Z
dc.date.available2025-10-24T18:09:12Z
dc.date.issued2018
dc.departmentMalatya Turgut Özal Üniversitesi
dc.description.abstractIn this work, we demonstrate vertical GaN, AlN, and InN hollow nano-cylindrical arrays (HNCs) grown on Si substrates using anodized aluminum oxide (AAO) membrane templated low-temperature plasma-assisted atomic layer deposition (PA-ALD). III-Nitride HNCs have been characterized for their structural, chemical, surface, and optical properties. The material properties of nanostructured III-nitride materials have been compared with the thin-film counterparts which were also grown using PA-ALD. Our results revealed that long-range ordered arrays of III nitride HNCs were successfully integrated on Si substrates and possess hexagonal polycrystalline wurtzite crystalline structure. Such long-range ordered wafer-scale III-nitride nanostructures might be potentially used in piezotronic sensing, energy harvesting, resistive memory, flexible and wearable electronics, III-nitride photovoltaics, and (photo)catalysis.
dc.identifier.doi10.1039/c8tc01165f
dc.identifier.endpage6482
dc.identifier.issn2050-7526
dc.identifier.issn2050-7534
dc.identifier.issue24
dc.identifier.scopus2-s2.0-85049155811
dc.identifier.scopusqualityQ1
dc.identifier.startpage6471
dc.identifier.urihttps://doi.org/10.1039/c8tc01165f
dc.identifier.urihttps://hdl.handle.net/20.500.12899/3517
dc.identifier.volume6
dc.identifier.wosWOS:000436030200016
dc.identifier.wosqualityQ1
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherRoyal Soc Chemistry
dc.relation.ispartofJournal Of Materials Chemistry C
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20251023
dc.subjectAligned Inn Nanorods; Gan Nanowires; Thin-Films; High-Density; Growth; Epitaxy; Aln; Nanostructures; Nanoparticles; Fabrication
dc.titleLong- range ordered vertical III- nitride nanocylinder arrays via plasma- assisted atomic layer deposition
dc.title.alternativeLong-range ordered vertical III-nitride nano-cylinder arrays: Via plasma-assisted atomic layer deposition
dc.typeArticle

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